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Oxygen '96

Early Stages of Oxygen Precipitation in Silicon


26th - 29th March 1996
NATO Advanced Research Workshop

Co-sponsored by the University of Exeter


The following list of abstracts shows those provided before the conference began; there were some additional poster presentations given during the conference. However this list largely coincides with the contents of the proceedings to be published by Kluwers Academic Press. The exact list should be provided once the proceedings are published.

Talks:

  1. Magnetic resonance investigations of thermal donors in silicon
    C. A. J. Ammerlaan
  2. The role of trivalent oxygen in electrically active complexes
    P. Deák
  3. Core structure of thermal donors in silicon
    J. Chadi
  4. Hydrogen-oxygen interactions in silicon
    S. K. Estreicher
  5. Theoretical studies of vacancy-oxygen and nitrogen-oxygen defects in silicon
    C. P. Ewels
  6. Low temperature diffusion and agglomeration of oxygen in silicon
    U. Gösele
  7. Oxygen-related luminescence centres created in Czochralski silicon
    E. C. Lightowlers and G. Davies
  8. Infrared studies of the early stages of oxygen clustering in silicon
    J. L. Lindström
  9. Effect of hydrogen on oxygen-related defect reaction in silicon at elevated temperatures
    V. P. Markevich
  10. The initial stages of oxygen agglomeration in silicon: Dimers, hydrogen and self-interstitials
    R. C. Newman
  11. Various configurations of isolated oxygen in semiconductors
    B. Pajot
  12. Oxygen in Silicon - a very complex simple jump
    M. Ramamoorthy
  13. Magnetic resonance on heat treatment centres in silicon
    J. -M. Spaeth
  14. The electronic structure of the oxygen donor in Si from piezospectroscopy
    M. Stavola
  15. Generation of thermal donors, nitrogen-oxygen complexes and hydrogen-oxygen pairs in Si
    M. Suezawa
  16. Relation between grown-in defects and oxygen precipitates in Czochralski silicon
    K. Sumino
  17. Properties of oxygen and oxygen-related defects in silicon determined from stress-induced alignment studies
    G. D. Watkins
  18. Precipitation kinetics of oxygen and transition metals in silicon
    E. R. Weber
  19. Passivation of thermal donors by atomic hydrogen
    J. Weber

Posters:

  1. Oxygen and copper precipitation during thermal annealing of monocrystalline silicon
    D. Ballutaud
  2. Uniaxial stress measurements on oxygen-implanted silicon: the 889 cm-1 local mode
    B. Bech Neilsen
  3. The nitrogen-pair oxygen defect in silicon
    F. Berg Rasmussen
  4. Formation of thermal donors in czochralski grown silicon under hydrostatic pressure up to 1GPa
    V. V. Emtsev
  5. Interaction of positrons with vacancy-oxygen complexes and oxygen clusters in Si
    M. Fujinami
  6. Shallow donor complexes in silicon
    A. Gali and J. Miro
  7. Molecular dynamics study of oxygen defects in silicon
    P. Grönberg and R. M. Nieminen
  8. Luminescence investigations of the interaction of oxygen with dislocations in Cz Si
    V. Higgs
  9. Computer simulation of defects distribution formed during CZ-si crystal growth
    L. Kawakami
  10. Some properties of oxygen-related radiation induced defects in silicon and germanium
    L. Khirunenko
  11. Defect profiling of oxygen related defects using a slow positron beam
    A. P. Knights
  12. Beam rapid thermal oxidation of Si
    S. A. Korenev
  13. An isochronal annealing study of the kinetics of VO and VO2 defects in neutron irradiated Si
    C. A. Londos
  14. Uniform stress effect on nucleation of oxygen precipitates in Czochralski grown silicon
    A. Misiuk
  15. Injection enhanced reactions of interstitial defects in silicon
    B. Mukashev
  16. Metastable interstitial silicon-interstitial oxygen complex in silicon
    B. Mukashev
  17. Thermal double donors in silicon: a new insight into the problem
    L. I. Murin
  18. Hydrogen plasma-assisted thermal double donor formation in silicon: effect of various parameters
    L. I. Murin
  19. Complexes of oxygen and group II impurities in silicon
    M. O. Henry
  20. Anomalous distribution of oxygen precipitates in a silicon wafer after anneal processes
    H. Ono
  21. Carbon-hydrogen-oxygen(?) related centre responsible for the photoluminescence I-line (0.965 eV).
    A. N. Safanov
  22. A kinetic model for precipitation of oxygen in Cz-Si
    S. Senkader
  23. Influence of isovalent doping on the processes of thermal donors formation in silicon
    V. Shakhovtsov
  24. Oxygen precipitation in MCz silicon: behaviour and dependence on the origin of raw material and growth conditions
    T. M. Tkacheva
  25. Oxygen gettering and thermal donor formation at post-implantation annealing of silicon
    A. G. Ulyashin
  26. On the impact of grown-in silicon oxide precipitate nuclei on silicon gate oxide integrity
    J. Vanhellemont
  27. Low temperature annealing studies of the divacancy in p-type silicon
    J. Vanhellemont
  28. Oxygen precipitation in annealed Cz. and FZ. silicon detected by S.I.R.M., F.T.I.R. and L.B.I.C.
    C. Veve and N. Gay
  29. Atomic composition, structure and vibrational excitation of substitutional carbon-oxygen complexes in silicon
    H. Yamada-Kaneta


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Last modified: Sun Mar 17 15:54:25 1996 by JG
                                                                                                                                                                                                                                                                       

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