Oxygen '96
Early Stages of Oxygen Precipitation in Silicon
PASSIVATION OF THERMAL DONORS BY ATOMIC HYDROGEN
Jörg Weber
and Dirk Bohne
Max-Planck-Institut für Festkörperforschung Postfach 80 06 65,
D-70506 Stuttgart, Germany
The binding of atomic hydrogen to Thermal Donors (TDs) is used to
learn more about the structure of individual TD species. The
TDnH complexes with n=1,2,... are electrically
neutral and can be fully reactivated at temperatures well below the
formation temperature of the TDs. The dissociation of TDnH
complexes is studied by means of infra-red absorption, capacitance
voltage profiling and deep level transient
spectroscopy. Characteristic differences in the dissociation process
for the individual TDnH complexes are detected: the
dissociation energies differ for the TDnH complexes and the
attempt frequencies are at least three orders of magnitude larger than
expected for an atomic jump process. Our results ask for different
core structures for TD1 and TDn with n>2 and large
lattice relaxations, which accompany the dissociation of the TD-H
complexes.
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Last modified: Mon Feb 19 12:10:48 GMT 1996
JG
