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Theoretical Physics
Oxygen defects in Silicon

2. What are oxygen defects made of?

There's a number of basic ingredients which can combine to form various different oxygen / silicon defects. These include:

In combination these can also form a range of other defects. Of particular recent interest is the interstitial oxygen pair, where two oxygen atoms sit on neighbouring bond centres. A pair such as this is believed to be able to diffuse much more rapidly than single interstitial oxygens, and could be responsible for rapid thermal donor formation at seemingly quite low temperatures.

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oxygen defects?
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