Diamond and Related Materials, 5(3-5), 236-241 (1996).

The theory of CVD diamond growth

M. I. Heggie (a), G. Jungnickel (b), C. D. Latham (c)

(a) School of Chemistry and Molecular Sciences, University of Sussex at Brighton, Falmer, BN1 9QJ, UK

(b) Institut für Physik, Technische Universität Chemnitz-Zwickau, D-01079 Chemnitz, Germany

(c) Department of Physics, University of Exeter, Stocker Road, Exeter, EX4 4QL, UK

(Submitted 1st September 1995; accepted in final form 31st October 1995)

Abstract

The theory of CVD diamond growth has developed into a mature subject of study of the last few years.  We do not try to reproduce or summarise all work to date, but rather we draw out the important conceptual differences between theoretical methods that have been used and instance their practical differences with selected results from suggested CVD diamond reaction schemes.

We conclude with two recent theoretical results which indicate that surface diffusion on {110} surfaces is likely and highly anisotropic and that on some diamond surfaces (e.g. {111} surfaces at ledges and where twin boundaries penetrate) a displacive transition to a graphite layer can occur.

Keywords: review, CVD-diamond, theory, growth



Christopher D. Latham HTML 3.2: [W3C][WDG]