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Limitations to n-type doping in diamond: the phosphorus-vacancy complex

R. Jones*, J. E. Lowther

Department of Physics, University of Witwatersrand, Johannesburg, South Africa

J. Goss

Department of Physics, University of Exeter, Exeter, EX4 4QL, United Kingdom

Applied Physics Letters, 69, 2489 (1996)

Abstract

In spite of large concentrations of phosphorus being incorporated into diamond, the material often remains insulating. It is argued that this occurs through the formation of phosphorus-vacancy complexes which are deep acceptors and compensate any donor. The complex is analyzed using a first principles cluster method. In the ionized state, the defect is diamagnetic and cannot give rise to any internal optical transitions although broad band donor-acceptor transitions are expected - and observed - in material co-doped with nitrogen.


There has been a considerable amount of work carried out on incorporating phosphorus in diamond with the aim of making a shallow donor defect. However, almost all studies have succeeded in making highly resistive material despite substitutional P (P tex2html_wrap_inline81 ) being expected to behave as a donor [1, 2, 3]. Electron paramagnetic resonance (EPR) provides some evidence for P tex2html_wrap_inline81  [4], and a second P defect is found in P doped diamond grown by the high pressure method [5]. The latter defect is trigonal with very little spin density at the P nucleus.

P has also been incorporated into chemical vapur deposition grown (CVD) diamond by adding PH tex2html_wrap_inline85 to the gas phase [6, 7]. Nitrogen apparently increases the incorporation of P within the films yielding concentrations as high as 3 tex2html_wrap_inline87  cm tex2html_wrap_inline89 (as measured via SIMS). In spite of these large concentrations, the films were highly resistive. Photoluminescence (PL) experiments revealed broad intense bands around 1.7 eV which increased with [P]. These were assigned to donor-acceptor pair recombination although the identities of the defects are not known. Significantly, no sharp optical lines due to P or the vacancy were detected.

Success at making conducting, n-type diamond has been achieved through a cold implantation of P ions followed by rapid thermal annealing [8]. It may be that this process rapidly removed vacancies resulting from the implantation.

CVD diamond usually contains a high concentration, up to tex2html_wrap_inline91  cm tex2html_wrap_inline89 of vacancies [9]. The lack of an optical signal due to vacancies in the P rich material suggests that they are bound up with P in some form. Now, impurity-vacancy complexes are important optical centers in diamond. The best understood is the N-V center whose electronic structure is easily understood in terms of the ideal neutral vacancy [10, 11, 12]. This has the electronic configuration tex2html_wrap_inline95 . In the N-V defect, where a C atom bordering the vacancy is replaced by N, the tex2html_wrap_inline97 level is split into an tex2html_wrap_inline99 -level lying below an e-doublet. For (N-V) tex2html_wrap_inline103 , the e-level contains two electrons in an S=1 state [13]. The partial occupancy of the e level permits tex2html_wrap_inline111 optical transitions which are assigned to the 1.945 eV optical center for [N-V] tex2html_wrap_inline103   [14, 15] and 2.156 eV for neutral N-V  [16, 13].

It might be thought that the P-V defect would be similar to N-V. In that case we would expect it to act as an acceptor, with spin 1 in the ionized state, and to possess a sharp luminescence line arising from the tex2html_wrap_inline111 internal transition. However, we shall show below that this is not the case and [P-V] tex2html_wrap_inline103 has spin S=0 and no internal optical transitions are possible. However, P-V does act as a deep acceptor and compensates substitutional P and N. This would explain the insulating properties of P-rich diamond, the lack of P-related sharp luminescent bands, as well as the presence of broad donor-acceptor optical bands.

We have carried out spin-polarized, ab initio calculations on P-V complexes using the AIMPRO [17] code. We used 86 atom clusters, C tex2html_wrap_inline121 H tex2html_wrap_inline123 , having trigonal symmetry from which two C atoms were removed and a P atom added. This generates a P-V pair. The basis used is similar to recent investigations on N-V and Si-V centers [13]. Previously [3], we have investigated substitutional phosphorus finding it to be an on-site defect with a localized vibrational mode around 380 cm tex2html_wrap_inline125 .

In the first case the P atom was placed as far away from the vacancy and the surface as possible. The structure was relaxed in the neutral charge state. Then the P atom was moved to border the vacancy and the cluster re-relaxed. The energy in this case was lower by 1.5 eV than the case where P was separated from the vacancy. This shows that substitutional P is unstable in the presence of vacancies and readily forms the P-V complex.

In the P-V complex, the P atom did not remain at its lattice site but drifted away until it lay mid-way between two lattice sites. This structure is quite distinct from N-V but is similar to the split-vacancy Si-V complex [13]. Fig. 1 shows the inner core of the relaxed 86 atom cluster showing its tex2html_wrap_inline127 symmetry. The six P-C lengths are 2.00 Å. The reason for the stability of the split-vacancy is partially connected with the large atomic size of P although Ge-V does not appear to assume the same structure. Fig. 2 shows the spin-polarized Kohn-Sham energy levels of the P-V defect in the vicinity of the band gap, together with those of a similar sized cluster without any defects. These reveal a mid-gap tex2html_wrap_inline129 -level (even) containing three electrons and an tex2html_wrap_inline131 -level just above the valence band top, resulting in an effective spin of S=1/2. The position of this mid-gap level is qualitatively similar to that found in the Si-V defect and thus the defect would be expected to trap electrons arising from say substitutional N or indeed P. Thus the P-V defect acts as a deep acceptor. However, the tex2html_wrap_inline129 levels are then filled and the defect must be diamagnetic and no internal optical transitions are possible.

When the Fermi-level is low, such as for example when the material is Irradiated or the absence of substitutional N, then a neutral P-V defect would be formed having S=1/2. The wave-functions of the tex2html_wrap_inline129 gap levels are combinations of tex2html_wrap_inline141 orbitals on the six C atoms surrounding P and possess very little amplitude on P itself as shown in Fig. 3. The trigonal symmetry of the defect and the fact that the spin density is very low on P suggests that this defect might be the EPR center investigated in Ref. [5].

Although no internal optical transitions are possible for the ionized defect, neutral pairs of N tex2html_wrap_inline143 and (P-V) tex2html_wrap_inline103 defects could luminesce and be the source of the broad band donor-acceptor recombination band observed in Ref. [7]. The luminescence energy would then be:

displaymath147

With the N donor level and the P-V acceptor level (Fig. 2) at tex2html_wrap_inline149  eV and tex2html_wrap_inline151  eV respectively, then for r about 5 Å, this transition would be around 1.5 eV, close to the observed value.

In conclusion, the calculations suggest a strong binding energy of P with vacancies. In the P-V center, the P atom lies mid-way between two vacancies. The center has tex2html_wrap_inline127 symmetry with spin S=1/2 in the neutral charge state, and there is little spin-density on the P atom consistent with EPR experiments. The defect acts as a deep acceptor and together with N would explain the pronounced broad PL bands seen around 1.7 eV in P-doped diamond. The defect could also compensate remaining substitutional P atoms. This would explain the difficulties in making phosphorus electrically active in diamond.

tex2html_wrap_inline79 present address: Department of Physics, University of Exeter, Exeter, EX4 4QL, UK.




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Antonio Resende
Thu Jan 16 10:42:45 GMT 1997