Interstitial-Carbon Hydrogen Interaction in Silicon next up previous
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Interstitial-Carbon Hydrogen Interaction in Silicon

A. N. Safonov, E. C. Lightowlers, Gordon Davies

Physics Department, Kings College London, Strand, London WC2R 2LS, United Kingdom

P. Leary, R. Jones

Department of Physics, The University of Exeter, Exeter, EX4 4QL, UK

S.Öberg

Department of Mathematics, University of Luleå, Luleå, S95187, Sweden

Physical Review Letters, 77, 4812-15, 1996

Abstract

The T-line luminescence system is created in Si by annealing at 400-600 tex2html_wrap_inline290 C. Shifts and splitting of the spectral features with tex2html_wrap_inline292 C and D isotope substitution identify the presence of two C atoms and one H atom in the center. Uniaxial stress and magnetic field measurements show that the T-center has monoclinic-I symmetry and possesses an acceptor (-/0) level at 0.2 eV below the conduction band. Ab-initio cluster calculations lead to a structure in which an interstitial C-H defect binds with a substitutional C atom. The calculated vibrational modes are in good agreement with those observed.


It is well established now that hydrogen is a common contaminant in silicon [1, 2, 3, 4]. It can interact with both shallow and deep level centers and eliminate their electrical [1] and optical [1, 4] activity. However, hydrogen can have a quite different effect. In this letter we report the structure and properties of an optical center created in silicon which is stabilized by the interaction between hydrogen and interstitial carbon. This center gives rise to the T-line (0.9351 eV) luminescence system which is created in either float-zone (FZ) or Czochralski (CZ) grown silicon by radiation damage and subsequent thermal treatment in the temperature range 400-600 tex2html_wrap_inline290 C, or by thermal treatment alone in carbon-rich CZ Si [2, 3, 4, 5, 6]. It can also be created in some [5, 6], but not all [7], FZ Si by thermal treatment without radiation damage. This center has been long known to be carbon related, a conclusion originally based on sample statistics [5], but subsequently confirmed by a shift in the zero-phonon line with tex2html_wrap_inline292 C isotope substitution [6]. However, recent investigations of silicon deliberately doped with hydrogen-deuterium mixtures have shown that hydrogen is also involved in this center [2, 3, 4]. We present the effects of isotope substitution on the local vibrational mode features observed in the luminescence spectra, the effects of uniaxial stress and magnetic field perturbations on the zero phonon line and temperature dependence measurements. These show that the center contains two inequivalent carbon atoms and one hydrogen atom, has monoclinic-I symmetry and creates an electron trap at 0.2 eV below the conduction band. Within these constraints, we use ab initio local density functional cluster theory to show that the structure consists of a tex2html_wrap_inline298 100 tex2html_wrap_inline300 oriented pair of carbon atoms which share a lattice site, together with one hydrogen atom attached to one of the carbon atoms. The calculation also allows us to assign the four observed local vibrational modes and account for their isotope shifts.

The material employed in the work reported here was mainly FZ silicon with [C] tex2html_wrap_inline302 2 tex2html_wrap_inline304 10 tex2html_wrap_inline306  cm tex2html_wrap_inline308 ; one sample had a tex2html_wrap_inline292 C/ tex2html_wrap_inline314 C ratio of tex2html_wrap_inline302 1.4. All the material was saturated with tex2html_wrap_inline302 1.5 tex2html_wrap_inline304 10 tex2html_wrap_inline322  cm tex2html_wrap_inline308 H, D, or a H+D mixture by heating in flowing gas for 30 minutes at 1300 tex2html_wrap_inline290 C, and rapidly cooling in silicone oil [8]. The material was then irradiated with a flux of either 10 tex2html_wrap_inline306  cm tex2html_wrap_inline332 neutrons, with a Cd ratio of 25, or 2 tex2html_wrap_inline304 10 tex2html_wrap_inline306  cm tex2html_wrap_inline332 2 MeV electrons, followed by annealing for 30 minutes at 450 tex2html_wrap_inline290 C. The photoluminescence (PL) was excited by a 514 nm Ar tex2html_wrap_inline342 laser and detected with a Fourier transform spectrometer fitted with a North Coast cooled Ge diode detector. Uniaxial stress measurements were made with stresses up to 160 MPa. Magnetic fields up to 5T were employed.

Fig. 1 shows a PL spectrum of the T-line system obtained at 35 K from a sample saturated with deuterium. The line at 1.75 meV higher energy than the T-line is associated with a zero-phonon transition from a higher excited state. The phonon-assisted region at lower energy contains a broad sideband of perturbed lattice modes, typical of carbon-containing defects [9], together with several local mode satellites L tex2html_wrap_inline344 -L tex2html_wrap_inline346 and resonance modes L tex2html_wrap_inline348 and L tex2html_wrap_inline350 . Above 10 K, all the L mode features are doublets mirroring the two zero-phonon transitions, showing that these features are all associated with the same defect.

We first discuss the isotopic shifts of local mode features which reveal the chemical composition and atomic structure of the center. In tex2html_wrap_inline314 C+ tex2html_wrap_inline292 C+H and tex2html_wrap_inline314 C+H+D mixed isotope materials, the T-line splits into two components establishing that the center contains carbon and hydrogen (Fig. 1). Similar isotopic splitting can be observed for the zero-phonon transition associated with the higher energy excited state. However, unlike the zero-phonon line, the L tex2html_wrap_inline346 local mode splits into four components in the mixed carbon isotope material (Fig. 2) which unambiguously shows that the defect contains two inequivalent carbon atoms, contrary to a previous conclusion [6]. The splitting of a zero-phonon line is dependent on the nature of the electron-phonon coupling [10] and, although this effect is extensively used for chemical characterization, it does not unambiguously reflect the atomic structure of the center. The modes and their isotope shifts are listed in Table 1. They give no indication that more than one hydrogen atom is involved in this center.

Next we discuss the results of external field perturbation measurements, which reveal the symmetry of the center and the origin of the luminescence transitions. Both the zero-phonon lines split into 2, 3, and 4 components under uniaxial stresses along tex2html_wrap_inline298 100 tex2html_wrap_inline300 , tex2html_wrap_inline298 111 tex2html_wrap_inline300 , and tex2html_wrap_inline298 110 tex2html_wrap_inline300 directions, respectively [7]. The relative amplitudes of the peaks do not depend on temperature, which strongly suggests that the splitting of the line is due to the lifting of orientation degeneracy. The number of components and the absence of thermalization suggest that the symmetry of the center is monoclinic-I [11]. This is not in agreement with the results of earlier study [6], where a smaller number of split components was observed, probably due to the lower spectral resolution employed. Temperature-controlled measurements have shown that with increasing temperature in the range 20-60 K, the photoluminescence (PL) intensity decays with an activation energy of 32 meV, which is much smaller than the total binding energy of the electron-hole pair, tex2html_wrap_inline380 235 meV. This is consistent with the T-line luminescence being related to the recombination of an exciton bound to a neutral center, where one particle is bound into a deep level state and other is weakly bound in the Coulomb potential produced by the first. The thermal dissociation of the bound exciton and PL decay, in this case, is associated with an excitation of the weakly bound particle to the nearest band. A detailed analysis of the uniaxial stress and magnetic field measurements has shown that the shallow effective-mass-like particle in the bound exciton is a hole, contrary to a previous suggestion [6], and consequently the defect possesses a deep acceptor level (-/0) at 0.2 eV below the conduction band [7]. It has been found that the behavior of the hole under external field perturbations, as well as the strong anisotropy of the g-tensor, can be successfully described by the characteristics of the valence band maxima, in agreement with the hole being bound by the Coulomb potential [7]. In addition, the analysis of the magnetic data has shown that the defect in its neutral ground state has an uncoupled electron with spin  tex2html_wrap_inline384 and a g-factor close to 2. Upon photo-excitation, when an exciton is bound to the defect and an additional electron occupies the acceptor level, the two electron are coupled in a singlet state with S =0, so that the magnetic splitting of the excited state is determined by the weakly bound hole with spin  tex2html_wrap_inline384 and strong anisotropic g-factors while the splitting of the final state is determined by the electron. This fully accounts for the observed structure of the Zeeman splitting, which corresponds to transitions between states with spin  tex2html_wrap_inline384 and explains the absence of thermalization between the two sub-levels of the final ground state and the absence of exchange coupling between the bound exciton particles [6]. Note that the paramagnetic nature of the center in its neutral state is consistent with the presence of one hydrogen atom in the defect.

Having established the chemistry and symmetry of the center, we now describe the results of ab initio cluster calculations which lead us to a unique model of the defect. Details of the method and applications to substitutional carbon (C tex2html_wrap_inline396 ), interstitial carbon (C tex2html_wrap_inline398 ), and the di-carbon defect (C tex2html_wrap_inline396 -C tex2html_wrap_inline398 ), as well as defects containing hydrogen have been given previously [12, 13, 14] and will not be repeated here. A trigonal 88 atom cluster C tex2html_wrap_inline350 HSi tex2html_wrap_inline406 H tex2html_wrap_inline408 was used in all calculations presented here, all atoms were relaxed until the equilibrium structure was determined. The second derivatives of the energy with respect to atomic positions were calculated for the C and H atoms, as well as their nearest Si neighbors. Energy second derivatives for the remaining atoms were taken from the Musgrave-Pople potential found by a previous ab initio calculation [15], and the dynamical matrix of the cluster, and hence its vibrational modes, were calculated.

We first note that the C-related L tex2html_wrap_inline346 mode at 1056 cm tex2html_wrap_inline284 lies within 130 cm tex2html_wrap_inline284 of modes due to C tex2html_wrap_inline398 and more than 400 cm tex2html_wrap_inline284 above those of C tex2html_wrap_inline396 [16]. This suggests that the T-center contains C tex2html_wrap_inline398 . We now argue that the observed C-isotope shifts of the L tex2html_wrap_inline346 mode suggest the presence of a C-C bond. This follows as the reduced mass of an isolated C-C unit implies that its stretch frequency would shift downwards by 20, 20 and 41 cm tex2html_wrap_inline284 for tex2html_wrap_inline292 C- tex2html_wrap_inline314 C, tex2html_wrap_inline314 C- tex2html_wrap_inline292 C, and tex2html_wrap_inline292 C- tex2html_wrap_inline292 C respectively. These shifts roughly agree with the observed values of 18, 27 and 45 cm tex2html_wrap_inline284 for the H case, and 16.5, 20.5 and 38 cm tex2html_wrap_inline284 for D. The different shifts in the two mixed C-isotope cases imply that the C atoms are inequivalent, and the distinct shifts in the H and D cases suggest that H is bonded with one of the C atoms. Thus we look for models with tex2html_wrap_inline444 symmetry containing C tex2html_wrap_inline398 and C-C-H units.

Several models were examined [17] and the ground state structure was found to be one shown in Fig. 3 where a tex2html_wrap_inline298 100 tex2html_wrap_inline300 oriented C-C pair share a substitutional site. The H atom is attached to one of the carbon atoms, denoted C tex2html_wrap_inline452 , and the second undercoordinated carbon atom is labeled C tex2html_wrap_inline344 . The calculations show that the C tex2html_wrap_inline344 -C tex2html_wrap_inline452 , C tex2html_wrap_inline452 -H, C tex2html_wrap_inline344 -Si and C tex2html_wrap_inline452 -Si bond lengths are 1.46, 1.11, 1.91 (2) and 2.05 (2) Å , respectively. The calculated vibrational modes and their isotope shifts are given in Table 1. Now, PL only detects modes of A-symmetry and we concentrate on those at 2913, 1180, 1098, 744, 558 and 542 cm tex2html_wrap_inline284 . The first four modes correspond predominantly to C tex2html_wrap_inline452 -H stretch, C tex2html_wrap_inline452 -H wag, C tex2html_wrap_inline344 -C tex2html_wrap_inline452 stretch and C tex2html_wrap_inline344 -Si stretch respectively. The last two modes at 558 and 542 cm tex2html_wrap_inline284 are close to the Raman frequency, and involve predominantly the motion of C tex2html_wrap_inline344 and C tex2html_wrap_inline452 , respectively, as well as their Si neighbors. There is close agreement between the modes L tex2html_wrap_inline350 to L tex2html_wrap_inline346 observed by PL and the calculated vibrational modes which enables them to be identified (Table 1). The two highest energy modes at 2913 and 1180 cm tex2html_wrap_inline284 are undetected by PL. However, the intensities of the phonon-assisted transitions are critically dependent on the exciton-phonon coupling, and not necessarily all local modes can be detected by PL. In addition, there is an experimental problem in observing the highest energy local mode since the Ge detector is insensitive in the region where the position of the corresponding luminescence line is expected. The C tex2html_wrap_inline344 -C tex2html_wrap_inline452 stretch mode lies close to L tex2html_wrap_inline346 and has carbon isotope shifts 19, 21, 41 cm tex2html_wrap_inline284 in the H case and 17, 24, 42 cm tex2html_wrap_inline284 in the D case. These shifts are in good agreement with the experimental values 18, 27, 45 cm tex2html_wrap_inline284 and 16.5, 20.5, 38 cm tex2html_wrap_inline284 , respectively, observed for L tex2html_wrap_inline346 . We therefore identify the L tex2html_wrap_inline346 mode with C tex2html_wrap_inline344 -C tex2html_wrap_inline452 stretch. The C tex2html_wrap_inline344 -Si stretch mode at 744 cm tex2html_wrap_inline284 involves the movement of H as well, but has little amplitude on C tex2html_wrap_inline452 . As a consequence, this mode displays large isotope shifts with both tex2html_wrap_inline292 C and D -- 23 cm tex2html_wrap_inline284 and 30 cm tex2html_wrap_inline284 respectively -- but essentially no additional modes appear in the mixed C-isotopic cases. These results allow us to identify the mode with L tex2html_wrap_inline452 at 796 cm tex2html_wrap_inline284 , which decreases by 25 and 37 cm tex2html_wrap_inline284 for tex2html_wrap_inline292 C and D, respectively, and involves the motion of only one of the C atoms. Finally, the two lower A modes at 558 and 542 cm tex2html_wrap_inline284 (H) are in good agreement with L tex2html_wrap_inline344 and L tex2html_wrap_inline350 , at 567.5 and 531.5 cm tex2html_wrap_inline284 , respectively. These modes are more delocalized and have only small shifts with D and the various combinations of the C-isotopes.

The neutral defect has a deep mid-gap donor level occupied by one electron, although the theory is unable to locate it exactly. This donor level has not been reported so far. The acceptor level at tex2html_wrap_inline544 eV would then be explained by a large Hubbard-U term of at least 0.4 eV. The structure and electronic properties of the center are similar to the stable form of the P-C tex2html_wrap_inline398 defect which possesses acceptor and donor levels at tex2html_wrap_inline550 eV and tex2html_wrap_inline552 eV respectively [18].

The wavefunction for the singly occupied level is localized on a non-bonding p-orbital on the C tex2html_wrap_inline344 atom and has spin  tex2html_wrap_inline384 in agreement with the Zeeman measurements described above. Only small isotropic hyperfine couplings with C tex2html_wrap_inline452 and H are, however, to be expected. The saturation of the dangling bond related to C tex2html_wrap_inline344 by a second H atom would eliminate the optical activity of the center, which might account for the observed loss of the PL intensity when the H concentration is large [3, 4].

The calculations presented here favor the tex2html_wrap_inline298 100 tex2html_wrap_inline300 oriented C tex2html_wrap_inline344 -C tex2html_wrap_inline452 -H split-interstitial as a candidate for the T-center, although additional support would arise from observations of the C-H stretch and wag modes at 2914 cm tex2html_wrap_inline284 and 1180 cm tex2html_wrap_inline284 , as well as the mode of B-symmetry. The presence of a C-C bond is surprising as the C tex2html_wrap_inline398 -C tex2html_wrap_inline396 defect, which is stable to about 300 tex2html_wrap_inline290 C, only contains C-Si bonds [19]. We suggest that the T-center is formed when C tex2html_wrap_inline398 traps H in the BC sited defect. This in turn diffuses to C tex2html_wrap_inline396 where conversion to the T-center takes place. A calculation shows the trapping of C tex2html_wrap_inline398 -H by C tex2html_wrap_inline396 leads to an energy reduction of 1.4 eV [17]. This formation mechanism is more likely than the trapping of H by the di-carbon defect as the latter is not stable at 400-600 tex2html_wrap_inline290 C.

The identification of this defect is important for several reasons. It is commonly produced in FZ and CZ silicon samples by irradiation and/or thermal treatment, showing that H is present as an unintentional impurity in silicon [2, 3]. The defect structure and the mechanisms of formation provide further evidence that thermal treatment of CZ Si leads to a generation of Si tex2html_wrap_inline398 , which can be subsequently trapped by C tex2html_wrap_inline396 to produce mobile C tex2html_wrap_inline398 . The stability of the T-center over an important temperature range (400-600 tex2html_wrap_inline290 C) where thermal donors are generated may enable it to be used to monitor Si tex2html_wrap_inline398 production. The results reported in this paper show that the presence of hydrogen can lead to the formation of unusually stable electrically and optically active defects.

In conclusion, a combination of high resolution photoluminescence experiments, Zeeman and uniaxial stress studies, and ab initio theory have successfully elucidated the structure and properties of an interstitial carbon-hydrogen defect in silicon.

This work was carried out with funding from the Engineering and Physical Sciences Research Council. R.J and P. L. thank the HPCI for computer time on the T3D at Edinburgh. S. Öberg thanks the Swedish National Scientific Research Council for financial support as well as the PDC for computer time on the SP2 at Stockholm.




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Antonio Resende
Tue Jan 14 17:43:28 GMT 1997